Pieter Gunter

ASML

System Engineering in EUV at ASML

Bio.

Bio: Pieter Gunter (1967) started his career in 1996 at Océ Technologies in Venlo, the Netherlands, where he held various positions in materials science and printer technology development. He joined ASML in Veldhoven, the Netherlands, in 2008 and has been active in multiple system engineering roles in immersion technology and EUV over the years. Pieter holds M.Sc. (“Ir”) (1991) and Ph.D. (1996) degrees from “Eindhoven University of Technology” (the Netherlands), specializing in the Physics and Chemistry of solid surfaces.

Abstract.
We will illustrate the system engineering way of working
inside ASML with some examples out of the EUV kitchen,
highlighting both the absolute necessity and the
limitations of advanced modeling and emphasizing the need
for bold and courageous system thinking